Recent advances in, e.g., fan-out wafer/panel level packaging (TSMC’s InFO-WLP and Fraunhofer IZM’s FO-PLP), 3D IC packaging (TSMC’s InFO_PoP vs. Samsung’s ePoP), 3D IC integration (Hynix/Samsung’s HBM for AMD/NVIDIA’s GPU vs. Micron’s HMC for Intel’s Knights Landing CPU), 2.5D IC Integration (TSV-less interconnects and interposers), embedded 3D hybrid integration (of VCSEL, driver, serializer, polymer waveguide, etc.), and 3D MEMS/IC integration will be discussed in this presentation. Emphasis is placed on various FOWLP formation methods such as chip-first with die-up, chip-first with die-down, and chip-last (RDL-first). Since RDLs (redistribution layers) play an integral part of FOWLP, various RDL fabrication methods such as Cu damascene, polymer, and PCB (printed circuit board) will be discussed. A few notes and recommendations on wafer vs. panel, dielectric materials, and molding materials will be provided. Also, TSV-less interposers such as those given by Xilinx/SPIL, Amkor, ASE, Intel, ITRI, and Shinko will also be discussed.
【議 程】
Lecture Outlines
(A) Introduction
(B) Fan-Out Wafer/Panel-Level Packaging
(1) Patents Impacting the Semiconductor Packaging
(2) Fan-out Wafer/Panel-Level Packaging Formations
Ø Chip-first (die-down)
Ø Chip-first (die-up)
Ø Chip-last (RDL-first)
(3) RDL Fabrications
Ø Polymer method
Ø PCB/LDI method
Ø Cu damascene method
(4) TSMC InFO-WLP
(5) TSMC InFO-PoP vs. Samsung ePoP
(6) Wafer vs. Panel Carriers
(7) Notes on Dielectric and Epoxy Mold Compound
(8) Semiconductor and Packaging for IoTs (SiP)
(9) Wafer-Level System-in-Package (WLSiP)
(10) Package-Free LED (Embedded LED CSP)
(C) 3D IC Integration
(1) Memory Chip Stacking – Samsung’s DDR4 with TSVs
(2) Hybrid Memory Cube (HMC) – Intel’s Knights Landing
(3) High Bandwidth Memory (HBM) – Hynix/AMD’s GPU
(4) Samsung’s Widcon
(5) 3D IC/MEMS Integration
(6) Embedded 3D Hybrid Integration
(D) 2.5D IC Integration and TSV-Less Interposers
(1) TSMC/Xilinx’s CoWoS
(2) Xilinx/SPIL’s TSV-less SLIT
(3) Amkor’s TSV-less SLIM
(4) ASE’s TSV-less FOCoS
(5) Intel’s TSV-less EMIB
(6) ITRI’s TSV-less TSH
(7) Shinko’s TSV-less i-THOP
(E) Semiconductor Packaging New Trends
(F) Summary and Q&A
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